JPS6151241B2 - - Google Patents

Info

Publication number
JPS6151241B2
JPS6151241B2 JP52052746A JP5274677A JPS6151241B2 JP S6151241 B2 JPS6151241 B2 JP S6151241B2 JP 52052746 A JP52052746 A JP 52052746A JP 5274677 A JP5274677 A JP 5274677A JP S6151241 B2 JPS6151241 B2 JP S6151241B2
Authority
JP
Japan
Prior art keywords
interference
lens
gap
light
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52052746A
Other languages
English (en)
Japanese (ja)
Other versions
JPS52143052A (en
Inventor
Jaaritsushu Uorutaa
Makotsushu Gyuntaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS52143052A publication Critical patent/JPS52143052A/ja
Publication of JPS6151241B2 publication Critical patent/JPS6151241B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP5274677A 1976-05-21 1977-05-10 Method of measuring gap* thickness* and flatness by interference Granted JPS52143052A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762622787 DE2622787C2 (de) 1976-05-21 1976-05-21 Verfahren zur interferometrischen Abstands-, Dicken- oder Ebenheitsmessung

Publications (2)

Publication Number Publication Date
JPS52143052A JPS52143052A (en) 1977-11-29
JPS6151241B2 true JPS6151241B2 (en]) 1986-11-07

Family

ID=5978663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5274677A Granted JPS52143052A (en) 1976-05-21 1977-05-10 Method of measuring gap* thickness* and flatness by interference

Country Status (3)

Country Link
JP (1) JPS52143052A (en])
DE (1) DE2622787C2 (en])
FR (1) FR2352279A1 (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2851750B1 (de) * 1978-11-30 1980-03-06 Ibm Deutschland Verfahren und Vorrichtung zur Messung der Ebenheit der Rauhigkeit oder des Kruemmungsradius einer Messflaeche
DE3175207D1 (en) * 1981-05-29 1986-10-02 Ibm Deutschland Process and device for interferometric evenness measurement
US4560280A (en) * 1982-08-31 1985-12-24 Tokyo Shibaura Denki Kabushiki Kaisha Apparatus for optically measuring the distance between two grating-like structures and the size of periodic pattern elements forming one of the grating-like structures
JPS6121391A (ja) * 1984-06-30 1986-01-30 日産車体株式会社 真空給液装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5533001B2 (en]) * 1972-09-20 1980-08-28

Also Published As

Publication number Publication date
JPS52143052A (en) 1977-11-29
FR2352279B1 (en]) 1979-03-09
FR2352279A1 (fr) 1977-12-16
DE2622787C2 (de) 1978-05-18
DE2622787B1 (de) 1977-09-22

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